Cluster PVD
NxT-300 Sputtering System
NxT-300S Sputtering System
NxT-200 Sputtering System
NxT-200S Sputtering System
In-Line PVD
In-Line Sputtering System(For Power Semiconductor)
R&D Equipment
EUV Blank Mask Ion Beam Deposition System
Cluster R&D Equipment
TiCN/DLC High Hardness Sputtering System
Multi-Reactive Sputtering System